Instrument name: Low Energy Ion Implanter
Manufacturer: Zhongke Tongchuang (Chengdu)
Model: LZD-600-G
Application: It plays a significant role in fields such as Cosmochemistry, Astrobiology, and the verification of space payload performance.
Main technical indicators:
Ion Source: Gas ion sources such as H+, N+, O+/-, Ar+; solid metal and non-metal ion sources like Li, C, Si, Li, Au, Pt.
Working Energy: 1-70 keV
Ultimate Vacuum Pressure: 10-4 Pa
Location: Room A101, Building A, Macau University of Science and